Universal Plasma Abatement System

Fuel-free abatement solution for the destruction of perfluorinated compounds (PFCs) and hydrofluorocarbons (HFCs)

UPAS Brochure

UPAS uses microwave atmospheric plasma to efficiently destroy high-GWP PFCs and HFCs emitted by etching processes.

Unique post-pump solution to convert stable, polluting PFCs/HFCs into forms easier to scrub, reducing Scope 1 CO2 equivalent emissions for industries and semiconductor industries wishing to limit greenhouse gas emissions.

UPAS Key benefits

Unmatched abatement efficiency:
Achieves >99% DRE for most PFCs and >95% DRE for difficult gases like SF6 and CF4. This is 10 times more efficient than traditional burner technology.
Significant operational savings:
It is a fuel-free solution, eliminating the need for fossil fuels or O2. It also saves 2 m3 of water per day per chamber and reduces effluent flow.
High reliability and low maintenance:
The modular design ensures high uptime (>99.5%) and extremely low maintenance, with planned maintenance required only once a year.
Compact integration:
Its smaller footprint allows easy integration into existing fabs.

The UPAS system converts stable fluorinated gases like PFCs and HFCs into easily wet-scrubbed compounds. This is achieved using Air Liquide's atmospheric pressure microwave plasma technology, which reaches very high electron temperatures of 6,000C° to ensure high disassociation rates and destruction efficiency. The system can manage exhaust from up to four tools.

Frequently Asked Questions (FAQ)

How does the system ensure high abatement efficiency?

UPAS uses atmospheric microwave plasma reaching 6,000°C to maximize gas disassociation. It achieves a Destruction and Removal Efficiency (DRE) of >99% for most PFCs and >95% for SF6 and CF4 , making it 10 times more efficient than traditional burner technology.

What gases are treated and what is the system's capacity?

It destroys high-GWP PFCs and HFCs from semiconductor etching processes. Thanks to its compact design , a single unit can manage the exhaust from up to four production tools simultaneously.

What are the key operational and reliability benefits?

It is a fuel-free solution that eliminates fossil fuels and $O_2$ , while saving 2 m³ of water per day per chamber. Its modular design ensures >99.5% uptime with planned maintenance required only once a year.