Thermo Scientific™ APIX™ Analyzer

High-performance API-MS solution for ultra-trace impurity monitoring in semiconductor bulk gas distribution systems.

Photograph used courtesy of Thermo Fisher Scientific; copying prohibited

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Real-time ppt-level impurity analysis for bulk gases, ensuring high-yield semiconductor manufacturing.

Precision analysis for process gas integrity

  • Unmatched sensitivity : Achieves parts-per-trillion (ppt) detection limits for critical impurities like H2O, O2, CH4, CO and CO2 in N2, ARr, He, H2 backgrounds.
  • Real-time monitoring : Provides continuous, 24/7 analysis with ultra-fast 1 to 2-minute cycle times to detect contamination spikes before they impact wafer yield. 
  • ALES expert integration : Optimized performance when paired with ALES custom-manufactured blenders, enabling automated ppt-level calibration, and up to 96 sampling inlets. 
  • Industrial reliability : Designed for maximum uptime in fab environments with native DCS connectivity (Modbus, Profibus) and fully automated operation via GasWorks® software. Includes dedicated safety configurations for bulk hydrogen monitoring.

The APIX utilizes Atmospheric Pressure Ionization Mass Spectrometry (API-MS) technology. By ionizing gas molecules at atmospheric pressure, the system achieves an ionization efficiency up to 1,000 times greater than traditional vacuum MS, allowing for ultra-trace detection. Integrated with ALES sampling technology, the system can monitor up to 96 streams with high precision.

Used by permission of Thermo Fisher Scientific, the copyright owner.

Frequently Asked Questions (FAQ)

Is GasWorks Software 21 CFR Part 11 compliant?

Information is provided to aid in the running of Gasworks Software in a 21 CFR Part 11 compliant environment. It should be noted that system qualification, validation, and implementation of standard operating procedures are essential elements of Part 11 compliance that cannot be achieved through software functionality alone. While many of the requirements in the regulations are addressed by Thermo Fisher Scientific software features, all aspects of the system must be validated by the customer or their designee.

How secure is GasWorks Software with multi-users?

A number of different user groups are defined by the system administrator. Each group can be provided with a configurable set of access permissions. The administrator is given the option of limiting the number of password retries, assigning an expiration date for passwords, enabling an audit trail, and setting automatic log out.

What if I cannot connect to GasWorks Software to access the data?

GasWorks Software has its own data review program that can be installed on an office PC and reviewed offline.

Smart operation & hydrogen safety

Maximize uptime and safety in your fab with our seamlessly integrated platform:

  • Intuitive GasWorks® software: Fully automates multi-point calibrations and real-time monitoring. No specialized mass spectrometry expertise is required.
  • Exclusive H2-Ready configuration: Specifically engineered for bulk Hydrogen monitoring. Features advanced safety layers including automated N2 fail-over, inert pump purging, and emergency shut-off sensors.

Documentation

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