Oven Cabinet: vapor phase delivery
Uninterrupted supply of process gas via the auto-switchover of two sources. Ensure stable pressure and variable flow-rate for your solid precursors
Continuous vapor phase delivery for 3D NAND and DRAM
Optimizing solid precursor delivery
The Oven Cabinet is a High Volume Module (HVM) designed to deliver the vapor phase of solid precursors from canisters directly to your tool lines . Utilizing patented All Vapor Phase (AVP) technology, it ensures an uninterrupted supply of process gas through the automatic switchover of two sources.
Key benefits & features
- Continuous delivery: Auto-switch system with automatic purge sequences maintains gas quality and purity.
- High performance: Offers variable flow-rate with stable pressure and accurate temperature control.
- Maximized efficiency: Canister level control ensures maximum precursor usage. Accommodates 8 L, 16 L, or 40 L canisters.
- Advanced control: Features a PLC-based technology with a 12" color touch screen and Ethernet communication for SCADA monitoring.
- Proven reliability: OEM proven and recognized as the Customer Best Known Method (BKM) for 3D NAND (Mo application).
Applications in electronics
Ideal for delivering metal electrode precursors (WCl5, WCl6, MoCl5, MoO2Cl2) and advanced high-k precursors (HfCl4, ZrCl4, AlCl3) used in DRAM and 3D NAND applications for example.
Uncompromising safety
Equipped with comprehensive safety features including emergency gas shutdown, exhaust flow control, multiple temperature switches, and optional gas leak and fire detection
Frequently Asked Questions (FAQ)
What precursor types are supported?
The Oven Cabinet supports both metal electrodes precursors and Advanced High-k Precursors.
What are the delivery options?
Precursors can be delivered either via pure vapor draw or with a carrier gas.
What are the utility requirements?
It requires Ar or N2 purge gas, clean dry air or N2 for pneumatic valves, and a 3-phase 208 V electrical power supply
Documentation
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Oven Cabinet brochureDownload the document PDF (449.06 KB)
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