Gas mixers: Precision gas blending
Fully automatic, on-site systems for generating continuous, high-accuracy, and high-purity forming or doping gas mixtures.
Transform your gas supply from high-risk, high-turnover cylinders to a safe, stable, and cost-effective on-site solution.
Precision gas blending for critical processes
Air Liquide's Gas Mixers are advanced, fully automatic fluid distribution systems designed to generate high-accuracy gas mixtures on-site, directly at the Point Of Use (POU). Leveraging 40 years of expertise, these mixers provide a superior, continuous, and safer alternative to traditional pre-mixed cylinders for demanding applications in Electronics and beyond.
The Air Liquide difference: accuracy, safety, and cost savings
- Unmatched stability: Achieve better reproducibility and process stability, with accuracy down to 1% RSD for Forming Gas and down to 100 ppm for Doping Gas.
- Increased availability: Real-time, integrated gas analyzers and automatic recalibration eliminate the need for manual cylinder changes and frequent tool recalibration, maximizing user tool availability.
- Superior safety: Significantly reduce operator intervention and eliminate the manual handling of heavy, high-pressure cylinders. Features include multi-level password protection, fire detection, and gas detection management.
- Cost efficiency: Realize unsurpassed cost savings, with Return On Capital (ROC) possible in less than 6 months for certain applications
Frequently Asked Questions (FAQ)
How does the system ensure high-quality mixture concentration?
Mixture concentration is continuously monitored in real-time by an integrated gas analyzer. Advanced algorithms drive the Mass Flow Controllers (MFC) with automatic control of MFC drift and auto-recalibration features to maintain the set concentration.
What are the typical gases and flow ranges supported?
The Forming gas mixer handles gases like H2, N2, O2, He, and Ar, with flow ranges up to 1 200 slpm. The Doping gas mixer handles typical doping and balance gases (e.g., B2H6, GeH4) with flow ranges up to 50 slpm.
What safety features are integrated into the gas mixers?
Key safety features include gas detection management, standard exhaust flow alarm, critical functions protected by multi-level password, fire detection, and individual relief valves on the buffer vessel.
Documentation
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Forming gas mixerDownload the document PDF (811.63 KB)
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