Chemical blenders for semiconductor

Q: What is the typical accuracy of the FabChem™ DIL blenders?

Typical relative blend accuracy ranges from 0.5% to 1% error (depending on the chemical and blend ratio), ensuring precision for critical processes.

Q: Which chemicals are supported by this blending system?

The systems are primarily designed for semiconductor blending applications with base-line chemicals such as TMAH, HF, and NH4OH.

Q: What safety features are integrated into the FabChem™ DIL systems?

Key safety features include cabinet leak detection, door interlocks, CDA-purged electrical compartments, and fail-safe automatic operation.

Ensure ultra-high blend accuracy and continuous supply for critical base-line chemicals with our highly reliable FabChem™ DIL Online and Batch technologies.

Solving the challenge of precise, high-volume chemical blending in semiconductor fabs.

Maximise yield with ultra-accurate chemical blending

Air Liquide offers a configurable range of highly reliable and accurate chemical blending equipment designed for all semiconductor blending applications. Our expertise, built on over 25 years of chemical management, ensures top-tier performance for base-line chemicals (like TMAH, HF, NH4OH, etc.) that are critical to your process.

Reliable performance: Blend capacity and accuracy suitable for high-volume manufacturing settings.
High accuracy: Integrated metrology with automatic dosing and blend correction achieves up to 0.5% typical relative blend accuracy (depending on chemical and ratio).
Flexible range: Highly configurable equipment to meet specific fab requirements.
Engineered for uptime: Robust systems ensure uptime > 99.99% (Online) and MTTR < 2 hours.

FabChem™ DIL: choosing your blending solution

FabChem™ DIL Online: This is a continuous flow-controlled blending system, where concentrated chemicals are precisely injected into a DI-water stream, under continuous monitoring and adjustment of the blend. It is perfect for high blending flow rates (up to 40 liters/min) and high consumption chemicals (up to 10,000 liters/day)
FabChem™ DIL Batch: This weight-based system uses a scale-mounted mix tank where constituents are added sequentially. The batch is validated by metrology and transferred to a daytank. It is a cost efficient solution for medium consumption chemicals

Our designs ensure easy maintenance access, promoting long-term reliability and competitive operating costs.